The second part focuses on the reliability issues in advanced copper interconnect structures. The longawaited transition to copper interconnects for memory devices skyrocketed in 2009 and will impact nearly every sector of the semiconductor equipment market into 2011. The preference for optical interconnects over purely electrical, copperbased interconnects increases as bandwidth requirements increase. A bright electron source, high beam current, and a novel, energy filtering. The rest of the industry would spend the next decade trying to catch up. The technology employs copper interconnect metallization based on the damascene. Minimize surface topography depth of focus, metal residues. The interconnect module is one of the key processing modules in ulsi cmos technology. Use cmp to remove the excess copper, leaving behind the upper level interconnect and the via between the upper and lower connects. In integrated circuits ics, interconnects are structures that connect two or more circuit elements such as transistors together electrically. A study of sulphur assisted corrosion in technologies with copper. Resistivity of metal line and thickness of cu barrier layer with technology nodes 40. The copper damascene process and chemical mechanical polishing. By then, copper interconnect has already become a standard process for high performance logic technology at ibm.
Advanced copper interconnect technology this 2 day tutorial will provide an overview of copper interconnect technology. Technology as an alternative to thermocompression bonding. In nanoscale regime as the cmos process technology continues to scale, the standard copper cu interconnect will become a major hurdle for onchip communication due to high resistivity and electromigration. The first requirement for an ild is a low dielectric constant k, but in our general discussion in sec. In this book, a leader in the field describes advanced laser systems with lower radiation.
Copper metal for semiconductor interconnects intechopen. In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths. Chemical mechanical planarization cmp opportunity has grown as. Copper interconnect technology ebook por tapan gupta. Optical interconnect an overview sciencedirect topics. Copper interconnect was introduced in 1997 when ibm made first processor which includes cu interconnect technology and manufacturing started at high. This book addresses the major issues encountered with the use of copper for interconnection lines in microelectronics. Cable and interconnect construction the absolute sound. Dbi technology as an alternative to thermocompression bonding. Advanced interconnects for ulsi technology wiley online. Interconnect functions, characterisations, electrical properties and wiring requirements. Complementing this advance in seed layer deposition, applieds electrodeposition technology delivers voidfree copper plating and achieves uniform deposition across the wafer with optimized chemistries.
In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of cuinterconnect technology. Due to these disadvantages of copper as interconnect material at advanced technologies, the conventional copper material is replaced by other new materials. Although copperlowk technology has become fairly mature, there is no single book available on the promise and challenges of these nextgeneration technologies. Smiths interconnect smiths interconnects technology papers. Copper interconnects have since become the industry standard, enabling future generations of smaller, faster microprocessors. Finding new materials for copperlowk interconnects is critical to the continuing development of computer chips. Optical interconnect technology is already the preferred choice for any wired highspeed communication channel covering distances beyond 100 m. In the past, aluminum was used as an interconnection metal of advanced cmos chips, where silicon oxidebased dielectrics were used as insulators between the. Copper interconnects have gained wide acceptance in the microelectronics industry due to improved resistivity and reliability compared to al interconnects. With the dual damascene process, a separate via technology is not necessary. Advanced metrology for copperlow k interconnects adoption is the dielectric film stiffness. Analysis of cnt bundle and its comparison with copper. First, the reliability of advanced metallization is discussed and the knowledge of electromigration em and stress induced voiding is introduced, followed by a brief. Copper interconnect technology by tapan gupta, paperback.
The copper axe by jared florance nook book ebook barnes. The first book on this crucial subject, copper interconnect technology covers all the technology options along with mathematical techniques needed to successfully implement copper interconnects a new technology used to make tiny microelectronics even smaller. Production problems given the above challenges, the engineers implementing a copperlowk interconnect architecture. Copper interconnect technology stanford university. Copper cu had been used to replace aluminum al as an interconnecting conductor in order to reduce the resistance. Tapan gupta since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit and system speed were focused on transistors as well. This text examines the role of copper in future interconnects, presents the range of problems involved, and explains how the solutions are being found. The design and layout of interconnects on an ic is vital to its proper function, performance, power efficiency, reliability, and fabrication yield. Accumulates in anode film and increases anode dissolution kinetics. In semiconductor technology, copper interconnects are used in silicon integrated circuits ics to reduce propagation delays and power consumption. Search for library items search for lists search for contacts search for a library. In this book, a leader in the field describes advanced. Advanced interconnects for ulsi technology is dedicated to the materials and methods which might be suitable replacements.
Learn about the materials science, fundamental principles and engineering technology necessary to effectively utilize copper cu interconnects. Jun 10, 2010 the longawaited transition to copper interconnects for memory devices skyrocketed in 2009 and will impact nearly every sector of the semiconductor equipment market into 2011. Increased packing density and reduced device size leads to. Chemical mechanical planarization cmp opportunity has grown as the number of interconnect levels has increased. Copper interconnect technology for the 32 nm node and beyond. This 2 day tutorial will provide an overview of copper interconnect technology.
It is apparent why the tin barrier material must also be conductive. By october 2001, ibm shipped more than 25 million socalled copper chips. The industry standard interconnect technology for fine. This has created a further demand for metrology to aid process engineers in characterizing and monitoring lowk films. In high end cables, the coppers purity is important. In 1999, he joined ibms manufacturing organization in essex junction, vt, where he has worked on copper interconnect processes for cmos logic and cmos imager technology. Copper interconnect technology ebook by tapan gupta. Everyday low prices and free delivery on eligible orders.
A study of sulphur assisted corrosion in technologies with copper interconnects. However, formatting rules can vary widely between applications and fields of interest or study. Ibm s contact and copper interconnect work created a new technology platform. Ceramic interconnect technology handbook crc press book ceramics were among the first materials used as substrates for massproduced electronics, and they remain an important class of packaging and interconnect material today. Lee copper interconnect technology por tapan gupta disponible en rakuten kobo. Deposition technologies of materials for cuinterconnects. Copper interconnect was introduced in 1997 when ibm made first processor which includes cu interconnect technology and manufacturing started at high volume from 1998. He has published over 90 technical papers and holds over 100. Some of these cookies are necessary for us to deliver this site to you, others help us to make sure you have an improved user experience on the smiths interconnect site and with our people. This site uses cookies to store information on your computer.
For over forty years, eatons connectors, cables, and nonexplosive actuators have established a track record of uncompromised reliability in harsh environments ranging from deep sea to deep space. Get to know the stateoftheart equipment and process schemes necessary to produce advance cu metallization in manufacturing. Award winners book club selections books by author books by series coming soon kids books new releases teens books this seasons biggest books. Resource library nov 15, 2016 by invensas corporation dbi, invensas. While there, he developed contact and interconnect processes for 0. Smiths interconnect offers a complete series of connectors available to utilize the quadsplitter technology with mildtl38999 series, combining the signal integrity of twinax cables and the connection density of quadrax. It combines materials, technology, and applications to address the needs of the microelectronics researcher. Book description copper interconnect technology is expected to be a key component in the quest to create more powerful cpus and memory chips. Copper interconnect technology request pdf researchgate. Copper interconnects exploding into 2011 thestreet. Copper is sometimes specified as containing some percentage of pure copper, with the rest impurities. Carriers adsorbed during copper plating to form a relatively thick monolayer film at the cathode wafer. The days of copper interconnects are numbered and carbon nanomaterials are poised to take up the job. It takes care of the electrical signal transmission between the active devices in semiconductor chips.
I have listened to a variety of copper cables kimber, dh labs, analysis plus, harmonic technology, etc. Preliminary reliability evaluation of copperinterconnect. Advanced interconnects for ulsi technology wiley online books. We have a set tube, obviously amp, a hybrid tube outstage amp, and the cd player also has a tube. This paper presents the comprehensive evaluation of mixed cnt bundle interconnects and investigates their prospects as a low power highspeed interconnect for future nanoscaleintegrated. The ceramic interconnect technology handbook goes beyond the traditional approach by first surveying the unique properties of ceramics and then discussing design, processing, fabrication, and integration, as well as packaging and interconnect technologies. In this chapter, the deposition method of cu films and the interconnect fabrication with cu metallization are introduced. Deposition technologies of materials for cu interconnects. It covers a broad range of topics, from physical principles to design, fabrication, characterization, and application of new materials for nanointerconnects, and discusses. This paper presents the comprehensive evaluation of mixed cnt bundle interconnects and investigates their prospects as a low power highspeed interconnect for future nanoscale. Carbon nanomaterials could push copper aside in chip. Book one of the copper fire and silken thunder connected two book seriessloan lassiter is a rich and powerful man. Copper interconnect technology is expected to be a key component in the quest to create more powerful cpus and memory chips.
Nov 15, 2016 this presentation presents the latest development in direct bond interconnect dbi, a cucu interconnect technology for both dietowafer d2w and dietodie d2d stacking. Motorola followed closely the heels of ibm in pursuit of cu interconnect. Conductors are usually made of copper or silver wire. Copper interconnect technology spie digital library. Cable assembly is the same size and weight as 24 awg quadrax cable assembly and offers identical flexibility and ease of use. Buy copper interconnect technology 2009 by gupta, tapan isbn. Better electromigration resistance, reduced resistivity and dielectric constant results in reduction in number of metal layers as more. Resistancecapacitance rc delay produced by the interconnects limits the speed of the integrated circuits from 0. Copper interconnect technology tapan gupta springer. It is written for professionals as well as graduate students, and belongs on the. In this chapter, the deposition method of cu films and the interconnect. Smiths interconnect high reliability connectors solutions.
As the technology nodes are scaled down, the density of the devices is increasing and long interconnect lengths are. Sep 24, 2007 while there, he developed contact and interconnect processes for 0. Since copper is a better conductor than aluminium, ics using copper for their interconnects can have interconnects with narrower dimensions, and use less energy to pass electricity through them. Chapter 6 process technology for copper interconnects. Read copper interconnect technology by tapan gupta available from rakuten kobo. Ceramic interconnect technology handbook crc press book. The material interconnects are made from depends on many factors. We now proceed to an examination of issues directly pertinent to the other component of an interconnect scheme, the interlayer dielectric ild. Copper interconnect technology is expected to be a key component in the quest to create more powerful. Since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit a.
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